High pressure cathode spray and Litography Unit
This unit offers two main techniques: High presure oxygen sputtering and electrom beam lithography (RAITH 50). Both systems are located inside the Clean Room of the CAI.
Contact
CAI Physical Technologies
High pressure cathode spray and Litography Unit
Facultad de Ciencias Físicas
Plaza Plaza de Ciencias 1
28040 MADRID (Madrid)
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caitecfis@ucm.es
Opening hours
| Monday | 9:00 - 15:00 |
| Tuesday | 9:00 - 15:00 |
| Wednesday | 9:00 - 15:00 |
| Thursday | 9:00 - 15:00 |
| Friday | 9:00 - 15:00 |
| Saturday | Closed |
| Sunday | Closed |
