ISO 6 and 7 Clean Room certificate
Tipo: Certificación
Ámbito: Internacional
Fecha: 16/01/2018
Referencia: ISO 6 y 7
Norma: IEST-RP-CC006.3, ISO 14644-1, ISO 14644-3
Clean Room Validation of the Physical Techniques CAI
Technical annex
CAI Physical Technologies
High pressure cathode spray and Litography Unit
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